ST1000

Model: ST1000 - This system is designed for measuring thicknesses of Polymer on a Substrate Wafer. Specification Item Specification Measurable Wavelength range 400 ~ 800nm Detector (Linear Array Type) 2048 pixels Theoretical resolution 1.5 nm Measurement spot size About 2mm Measuring Speed ≤ 2sec/ point (Without Moving) Stage Size 250 x 250mm Thickness measurement range 500 Å ~ 35 (Depending on materials) Multi-layer measurement Up to 7 layers (Depends on materials) Repeatability (Precision) :...

원문링크 : ST1000