ST4000/4030/AF-Option

[ST4000-DLX] Model: ST4000/4030/AF-Option - This system is designed for measuring thicknesses of Polymer on a Substrate Wafer. Specification Item Specification Measurable Wavelength range 350 ~950nm Detector (Linear Array Type) 2048 pixels Theoretical resolution 1 nm Measurement spot size 5X: 40um, 10X: 20um, 50X: 4um(Option) Glass Fiber Core: std 200um, 100um (Option) Measuring Speed ≤ 2sec/ point (Without Moving) Stage Size ST4000: 200 x 200mm, T/D: 200 x 200mm ST4030: 300 x 300mm, T/D: 300 ...

원문링크 : ST4000/4030/AF-Option