ST5030

[ST5030 SL on Passive Anti-vibration Table] Model: ST5030 - This system is designed for measuring thicknesses of Polymer on a Substrate Wafer. Specification Item Specification Measurable Wavelength range 350 ~950nm Detector (Linear Array Type) 2048 pixels Theoretical resolution 1 nm Measurement spot size 5X: 40um, 10X: 20um, 50X: 4um (Option) Glass Fiber Core: 200um, 100um (Option) Measuring Speed ≤ 2sec/ point (Without Moving) Stage Size 300 x 300mm, T/D: 300 x 300mm Thickness measurement ran...

원문링크 : ST5030