ST2000/2020

[ST2000-DLXn] Model: ST2000/2020/Micro-gauge - This system is designed for measuring thicknesses of Polymer on a Substrate Wafer. Specification Item Specification Measurable Wavelength range 350 ~950nm Detector (Linear Array Type) 2048 pixels Theoretical resolution 1 nm Measurement spot size 5X: 40um, 10X: 20um, 50X: 4um(Option) Micor-gauge: About 2mm (Non-Focus Optics)) Measuring Speed ≤ 2sec/ point (Without Moving) Stage Size ST2000: 150 x 120mm, T/D: 75 x 50mm ST2020: 205 x 205mm, T/D: 205 ...

원문링크 : ST2000/2020